ta-C涂層是一種無氫和無液滴的超級DLC涂層，與常規(guī)DLC涂層相比，其耐溫性能提高到500°C。具有更好的耐磨性（+300%），參考硬度為4200HV以上。創(chuàng)造了一個更平滑的涂層，無需任何后期拋光。涂層的硬度提高了40%，達到35-40GPa。硬度和耐磨性的提高，結合低摩擦性能和光滑的表面，為DLC涂層創(chuàng)造了新的性能和壽命標準。 

● Trend of Carbon based (DLC) Coating

● FCVA 方式 (Filtered Catodic Vacuum Arc)

特性

● FLA 方式 (Filtered Laser Arc)

LAMSIS is the filtered laser arc system for mass production of hydrogen free DLC(ta-C, a-C) coatings 

Better surface roughness can be achieved with a bent duct and electromagnetic filtering

Suitable for mass production with scale-up to higher coating height and faster deposition rate

[ Features ]

Effective zone : Φ800 x  max. H600~800mm

Thickness : 1~6um

Hardness : 15~60GPa depending on applications

Deposition rate : 0.3um/hH600 in double rotation with one laser

涂層種類：