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光刻濾光片ASAHI SPECTRA Photolithography Filters

Optics used for photolithography requires the environmental durability against high temperature and high efficiency in transmission and reflection to contribute a production yield.

Asahi provides bandpass filters for mercury emission lines, longpass filters, or cold mirrors coated by ion assisted deposition (IAD) method. IAD technology assures the durability of interference film against an inhospitable environment in a photolithography apparatus such as stepper. It also achieves the stable spectral performance and high transmission or reflection.

Large format optics is available as well, ∼ 600mm diameter.

用于光刻的光學元件需要對高溫環(huán)境的耐久性以及高透射和反射相結(jié)合，從而為提高產(chǎn)量做貢獻。

Asahi為汞排放線，長通濾波器或離子輔助沉積（IAD）法涂覆的冷鏡提供帶通濾波器。 IAD技術(shù)確保干涉膜在光刻設(shè)備（例如步進器）中對惡劣環(huán)境的耐久性。它還實現(xiàn)了穩(wěn)定的光譜性能和高傳輸或反射。

大型光學元件也可以使用，直徑約600mm。

光刻濾光片ASAHI SPECTRA  i-line Bandpass Filters

High power mercury lamps are often used in for photolithography apparatus such as LSI and LCD steppers as light source, especially i-line (365nm) is the most famous line. The bandpass filters for photolithography are required to transmit the monochromatic mercury line efficiently to achieve optimal resolution for the photomask. Furthermore the reliability for environmental durability cannot be negligible to reduce running cost.

Asahi i-line bandpass filters are produced by ion assisted deposition (IAD) technology with monolithic substrate to assure the durability against high temperature and keep stable spectral performance over time.

?Long life with stable spectral performance thanks to IAD and monolithic substrate

?According to the requirements, CWL and FWHM are adjustable

?Excellent coating uniformity despite of large format filter

  i-line 帶通濾光片

大功率汞燈常用于光刻設(shè)備，如LSI和LCD步進電機作為光源，尤其是i系列（365nm）是*的系列。用于光刻的帶通濾光片需要有效地傳輸單色水銀線以實現(xiàn)光掩模的佳分辨率。此外，環(huán)境耐久性的可靠性不能忽略，以降低運行成本。

Asahi i-line帶通濾波器采用離子輔助沉積（IAD）技術(shù)與單片基板產(chǎn)生，以確保耐高溫，并保持穩(wěn)定的光譜性能。

?采用IAD和單片基板，具有穩(wěn)定的光譜性能，延長使用壽命

?根據(jù)要求，CWL和FWHM可調(diào)

?盡管采用大型過濾器，但涂層均勻性