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賽默飛定制版SEM主動隔振系統(tǒng)

Overview

SEM-Base LP is a custom, low profile version of our standard SEM-Base active piezoelectric vibration cancellation platform. SEM-Base LP is easier to install, provides outstanding performance, and is ergonomically optimized. The compact design facilitates installation without lifting the Scanning Electron Microscope (SEM) column with anything other than the SEM’s built-in leveling feet. And, once installed, the SEM’s height above the floor does not increase. SEM-Base LP incorporates our unique STACIS piezo technology and has the same vibration cancellation performance as our industry-standard SEM-Base VI. SEM-Base LP includes casters and is designed specifically to integrate with many Thermo Fisher Scientific (formerly FEI) tools.

賽默飛定制版SEM主動隔振系統(tǒng)

Example of how SEM-Base LP integrates with the bottom frame of the tool

Compatible Thermo Fisher Tool Models

SEM-Base LP is compatible with many Thermo Fisher Scientific models including:

●Apreo

●Aquilos

●Helios Small DualBeam

●Nova NanoSEM x50

●Quattro S

●Scios

●Teneo

●Verios G4

●Verios 460, 460L

●Versa 3D

If your SEM/FIB is not listed, contact TMC to check for compatibility.

The SEM-Base Advantage

Hard-Mount Technology – SEM-Base is compatible with internal SEM vibration control systems and aggressively mitigates low frequency floor vibration starting at 0.6 Hz.

Active Inertial Vibration Cancellation – SEM-Base uses high sensitivity, low frequency inertial velocity sensors to achieve high levels of vibration attenuation, even on quiet floors.

Serial Design with Piezoelectric Technology – The unique serial design and proprietary highforce piezoelectric technology results in a wide active bandwidth from 0.6 Hz to 150 Hz and unmatched, inertial active vibration cancellation with 90% reduction starting at 2 Hz.

Performance

1800 lbs (818 kg) payload tested with simulated vibration at VC-C

(500 μin./s, 12.5 μm/s RMS)

Specifications

Performance Specifications

Design, Dimensions, and Environmental and Utility Requirements

Controller Specifications