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XPS-7半導(dǎo)體材料氣體檢測(cè)器
型號(hào) | 氣體 | F.S | 型號(hào) | 氣體 | F.S | 型號(hào) | 氣體 | F.S |
XPS-7NH | NH3 | 100ppm | XPS-7GH | GeH4 | 1ppm | XPS-7HS | H2S | 50ppm |
XPS-7SH | SiH4 | 25ppm | XPS-7CL | CL2 | 5ppm | XPS-7CO | CO | 250ppm |
XPS-7DC | SiHCL3 | 25ppm | XPS-7CF | CLF3 | 1ppm | XPS-7DS | Si2H6 | 25ppm |
XPS-7AS | AsH3 | 250ppm | XPS-7HC | HCL | 25ppm | XPS-7F2 | F2 | 5ppm |
XPS-7PH | PH3 | 1ppm | XPS-7HF | HF | 1ppm | XPS-7OZ | O3 | 1ppm |
XPS-7BH | B2H6 | 500ppm | XPS-7BF | BF3 | 1PPM | XPS-7NO | NO | 100ppm |
XPS-7SE | H2Se | 250ppm | XPS-7HB | HBr | 10ppm | XPS-7 | 氯甲烷 | 100ppm |