Crystal 12 傳感器

自動晶體轉(zhuǎn)換功能Z大限度延長生產(chǎn)時間

INFICON Crystal 12 傳感器與INFICON IC6 薄膜沉積控制器結(jié)合使用時，可自動更換其晶體，而無需中斷過程。晶體不穩(wěn)定或失效時，IC6 會立即向 Crystal 12傳感器旋轉(zhuǎn)傳送帶發(fā)送信號，要求其立即將新晶體旋轉(zhuǎn)到位，從而實現(xiàn)持續(xù)沉積速率監(jiān)控。為進(jìn)一步Z小化停工時間，可以將晶體預(yù)先加載到另一個可選旋轉(zhuǎn)傳送帶上，這樣，可以直接輕松快速地更換裝有失效晶體的旋轉(zhuǎn)傳送帶，從而Z大限度縮短系統(tǒng)打開的時間。

功能

裝有 12 顆晶體，可進(jìn)行可靠的自動轉(zhuǎn)換，從而Z大限度延長過程運行時間
易于拆卸的旋轉(zhuǎn)傳送帶允許快速更換所有 12 顆晶體
晶體轉(zhuǎn)換由空氣驅(qū)動完成（競爭產(chǎn)品是使用生熱電機(jī)），因而晶體溫度非常穩(wěn)定
易于拆卸的前沉積罩保護(hù)晶體和旋轉(zhuǎn)傳送帶上不會積存材料，從而Z大限度減少拆卸整個傳感器以進(jìn)行維護(hù)的必要性
可選安裝后套件允許用戶根據(jù)公制硬件大小自行修改

規(guī)格

類型		Crystal 12 Sensor
無水時的Z高烘烤溫度		130°C
Z小水流時的Z高工作等溫環(huán)境溫度		300° C
尺寸（Z大外殼）		4.0 in. (102 mm) dia. x 3.3 in. (84 mm) high 4.75 in. (121 mm) dia. x 3.46 in. (88 mm) with optional mounting posts installed
水管和空氣管長度		Standard 30 in. (762 mm)
晶體交換		Front-loading
安裝		Six #4-40 tapped holes on the back of the sensor body, six #4-40 tapped holes on outside circumference. Three #6-32 tapped holes with optional mounting kit (IPN 750-670-G1).
重量		4.92 lb. (2.23 kg)
安裝要求
饋入件		Qty (1) 2-3/4 in. ConFlat® with one coaxial feedthrough, two pass water, one air, IPN 750-685-G1, or, Qty (1) 750-685-G2, with one coaxial feedthrough three tube with Ultra-Torr compression fittings or, Qty (1) 1 in. bolt with one coaxial feedthrough, two pass water, one air IPN 750-030-G1
安裝		User to provide mounting structure adequate to support weight of Crystal12 and designed to facilitate removal and replacement with minimal change in exact position. An optional mounting post kit, IPN 750-670-G1, may be purchased for this purpose.
空氣和水連接		User to provide vacuum-tight braze joints or connectors for the water and air tubes. Valve assembly for air, IPN 750-420-G1 (not provided), with a 0.022 in. restrictor orifice installed by the user. (Orifice included with Crystal12 accessory kit.)
實用工具		Minimum water flow 150-200 cc/min, 30° C max (Do not allow water to freeze). Coolant should not contain chlorides as stress corrosion cracking may occur. Regulated air supply 80-90 PSIG (5.5 bar – 6.2 bar) [550 kPa - 620 kPa] 2 meter maximum length of 1/8 in. tubing between sensor head and the solenoid valve.
材料
板、材料罩、機(jī)械部件、主體和圓盤		304 type stainless steel
彈簧、電氣觸點		Au plated Be-Cu, Au Plated 302 stainless steel
水管和空氣管		S-304, 0.125 in. (3.2 mm) O.D. x .016 in. (0.4 mm) Wall Thickness x 30 in. Long (762 mm) seamless stainless steel tubing
連接器		Stainless steel
絕緣體		Teflon, Peek®
電纜		Teflon insulated copper plated steel
晶體		0.550 in. (13.97 mm) diameter
1 in. 螺栓和 Ultra-Torr（壓縮接頭）端接：
材料		304 stainless steel, Teflon, ceramic, beryllium nickel, VITON®
溫度		Operational environment to 300° C with water cooling or 165° C without
安裝		1.015 in. ±0.010 in. diameter aperture
CF 40 焊接式端接：
材料		304 stainless steel, Teflon, ceramic, beryllium nickel
溫度		Operational environment to 450° C with water cooling or 165° C without
安裝		Mates with 2 ? in. ConFlat type flanges with 1.375 in. I.D. min.

零件號

附件

名稱	說明
QCM 傳感器饋入件	QCM 傳感器饋入件

Crystal 12 Sensor
零件號	明細(xì)
750-420-G1	電磁閥，24 伏（與帶閘門和多晶體傳感器配合使用）

耗材

名稱	說明
石英監(jiān)控器晶體	石英監(jiān)控器晶體

備件

Crystal 12 Sensor
零件號	明細(xì)
750-276-P3	XTAL12 ACTUATOR COVER PASSIVATED
750-644-G1	CAROUSEL HOUSING WELDMENT
750-658-G1	Deposition Shield Assembly, Crystal 12
750-286-P2	Pneumatic Actuator,CrystalSix/Crystal 12
750-291-P1	Detent, CrystalSix/Crystal 12
750-294-P2	Stop Ratchet, CrystalSix/Crystal 12
750-293-P2	Ratchet, CrystalSix/Crystal 12
750-256-P2	Extension Spring
750-252-P2	DET,SPRING POST
750-649-G1	Electrical Connection, Crystal 12
750-295-G1	Pawl/Actuator Stem, Crystal 12 Sensor
750-258-P2	DET - Bearing Shaft
070-0779	Ball Bearing, CrystalSix
750-652-G1	Crystal Carousel, Crystal 12 Sensor
750-650-P1	RESISTOR NETWORK APERTURE PLATE
070-1253	Dowel Pin, CrystalSix
750-651-P1	RESISTOR NETWORK SUPPORT
750-655-P1	RESISTOR NETWORK INSULATOR
750-642-G1	Resistor Network Grid Weldment
750-661-P1	Contact Terminal, Crystal 12
750-656-P1	CRYSTAL INSULATOR
321-038-P6	Leaf Spring, Crystal 12
750-657-P1	Leaf Spring, Grounding, Crystal 12
750-671-P1	Torsion Spring, Gold Plated, Crystal 12
750-626-P1	Spring, Crystal 12 and Sputtering Sensor
750-647-P1	Carousel Spindle Body, Crystal 12
070-1268	Bearing, CrystalSix
070-1254	E-RING BOWED #HSTBtruarc
750-660-P1	Location Screw, 6-32, Crystal 12
007-126	DET-30"STN STL SEAMLESS TUBING
070-201	#4 開口緊鎖墊圈
084-004	#4-40 X 0.187 內(nèi)六角頭螺釘
070-398	5103-12H,EXT CRESCENT RET RING
070-0867	B4-10,1/8"SHAFT SPACER .094TH
070-170	#2 SPLIT LOCKWASHER SS
070-177	#4-40 X 3.12 六角頭螺釘
080-038	SCREW 0-80 x .375 LG PHIL PAN HD SS
082-032	Lock Washer, #2, Stainless Steel
082-045	#2-56 x 0.187 十字槽螺釘
084-054	開牙鎖定墊片4號
082-022	Washer, #2, Flat, Stainless Steel
082-024	Screw, Socket Head, 2-56 x 0.250 in.
750-292-P2	Detent Spacer, CrystalSix/Crystal 12
080-013	開片#0
080-007-P1	Flat Washer, Stainless Steel
080-009-P1	#0-80 X 0.188 凹頭螺釘
084-048	SCREW 4-40 x .250 LG PHIL FLAT HD SS
750-665-P1	Shoulder Screw, 2-56, Torsion Spring
084-093	Screw, Socket Head, 4-40 x 1.125 in.
086-084-P2	#6-21 x 1/8 固定螺釘
086-041	#6 平墊圈
086-038	#6 開口緊鎖墊圈
086-036	#6-32 x 3/8 凹頭螺釘
In-vacuum cables
321-039-G12	真空電纜，15.2 厘米（6 英寸）
007-252	真空電纜，30.5 厘米（12 英寸）
321-039-G11	真空電纜，61.0 厘米（24 英寸）
007-044	真空電纜，78.1 厘米（30.75 英寸）
007-059	真空電纜，91.4 厘米（36 英寸）
007-061	真空電纜，121.9 厘米（48 英寸）- 需要 ModeLock 控制器
321-039-G13	真空電纜，154.2 厘米（60 英寸）- 需要 ModeLock 控制器
321-039-G14	真空電纜，182.9 厘米（72 英寸）- 需要 ModeLock 控制器
321-039-G15	真空電纜，3.5 米（137.8 英寸）- 需要 ModeLock 控制器和4 米 XIU
321-039-G16	真空電纜，4 米（157.5 英寸）- 需要 ModeLock 控制器和4 米 XIU