UHV 可烘烤傳感器

INFICON UHV 可烘烤晶體傳感器擁有經(jīng)實(shí)踐檢驗(yàn)的可靠性和耐用性，提供超越當(dāng)前市場(chǎng)上的任何傳感器頭的Z佳熱穩(wěn)定性?？珊婵緜鞲衅饔?304 號(hào)不銹鋼、鉬、鉻鎳鐵合金、鎳和氧化鋁材料制成，設(shè)計(jì)為可承受連續(xù)烘烤溫度高達(dá) 450° C（僅適用于烘烤，實(shí)際沉積監(jiān)控需要水流）。前裝式設(shè)計(jì)允許在側(cè)面插入空間不足的應(yīng)用中輕松插入晶體支架。

UHV Bakeable Sensor_detail_sil_left_SMALL.png

功能

高溫銅焊和焊接結(jié)構(gòu)
烘烤溫度高達(dá) 450° C
晶體閘（選件）
前裝式晶體支架
易于安裝
CF40 饋入件
饋入件不需要銅焊或焊接
焊接為客戶長(zhǎng)度的傳感器/饋入件組合

規(guī)格

類型	Bakeable Sensor w/ Shutter	Bakeable Sensor w/out Shutter
Z高溫度	400° C continuous (for bake only; water flow recommended for actual deposition monitoring)	450°C continuous (for bake only; water flow recommended for actual deposition monitoring)
傳感器頭部尺寸（Z大外殼）	1.35 in. x 1.38 in. x 1.21 in. high (34 mm x 35 mm x 31 mm high	1.35 in. x 1.38 in. x 0.94 in. high (34 mm x 35 mm x 24 mm high)
晶體交換	Front loading, self-contained package for ease of exchange. Cam-type locking handle allows easy removal and good thermal contact. Pneumatically operated shutter flips up for easy crystal exchange.	Front loading, self-contained package for ease of exchange. Cam-type locking handle allows easy removal and good thermal contact.
安裝	a) Standard—four #4-40 tapped holes on the back of the body b) Optional—right angle bracket; IPN 007-108	Four #4-40 tapped holes on the back of the body
饋入件	2? in. ConFlat®, integral with sensor head Water, air and coax tubes are semi-rigid, but easily formed (2.0 in. [50.8 mm] minimum bend radius)	2? in. ConFlat, integral with sensor head Water and coax tubes are semi-rigid, but easily formed. (2.0 in. [50.8 mm] minimum bend radius)
實(shí)用工具	1) Minimum water flow 150-200 cc/min, 30° C max. (Do not allow to freeze.) (Customer should provide means of easily disconnecting the ? in. water tubes during bakeout.) 2) Filtered, oil-free air, regulated at 80 PSIG (5.5 bar) [552 kPa] 3) Solenoid valve, 750-420-G1, 24 VAC or VDC, or equivalent valve required	Minimum water flow 150-200 cc/min, 30° C max. (Do not allow to freeze.) (Customer should provide means of easily disconnecting the ? in. water tubes during bakeout.)
材料
主體和支架	304 type stainless steel	304 type stainless steel
彈簧	Molybdenum and Inconel X-750	Molybdenum and Inconel X-750
水、空氣和同軸管線	0.125 in. (3 mm) O.D. water and air x 0.015 in. (0.4 mm) wall thickness seamless 304 stainless steel; 0.188 in. (5 mm) O.D. coax
其他機(jī)械部件	18-8 or 304 stainless	18-8 or 304 stainless
絕緣體	>99% Al2O3 in vacuum; other high density ceramics used elsewhere	>99% Al2O3 in vacuum; other high density ceramics used elsewhere
電線	1) Ni (in vacuum) 2) Ni plated Cu (elsewhere)	1) Ni (in vacuum) 2) Ni plated Cu (elsewhere)
銅焊	Vacuum process high temperature Ni-Cr alloy	Vacuum process high temperature Ni-Cr alloy
晶體	0.550 in. (13.97 mm) diameter	0.550 in. (13.97 mm) diameter

零件號(hào)

UHV PN.png

附件

零件號(hào)	明細(xì)
750-420-G1	電磁閥，24 伏（與帶閘門和多晶體傳感器配合使用）

耗材

名稱	說明
石英監(jiān)控器晶體	石英監(jiān)控器晶體

備件

零件號(hào)	明細(xì)
007-007	止動(dòng)彈簧（用于晶體支架）
007-064	陶瓷夾持器
007-094	Clamping Sring, UHV Bakeable Sensor
007-095	Handle, UHV Bakeable Sensor
007-098	母型連接器（包括套圈和螺母）
007-099	可烘烤頭部觸點(diǎn)
007-100	High Temperature BNC Insulator
007-103	Insulator, UHV Bakeable Sensor
007-104	High Temperature BNC Body, Bakeable
007-147	Vented Screw, 4-40 x 3/8 in.
007-155	BRAZE ASM 12 IN. 206-804-G1
007-156	BRAZE ASM 20 IN 206-804-G2
007-157	BRAZE ASM 30 IN 206-804-G3
007-228	SPEC,4-40 X 5/8 VENTED SHC SC
007-267-P2	Spreader Bar, UHV Bakeable Sensor
007-268-P1	Shoulder Washer, UHV Bakeable Sensor
007-269-P1	Shoulder Washer, UHV Bakeable Sensor
008-007	CRYSTAL SNATCHER
059-0084	Gasket, Copper, Bakeable Sensor Actuator
070-201	#4 開口緊鎖墊圈
084-069-P1	SCREW 4-40 x .187 LG PHIL FLAT HD SS
750-018-P3	SPLIT CLAMP {THD} {CLEAN} @
750-018-P5	SPLIT CLAMP {CLEAN} @
750-022-G5	ACTR/AIR LINE 12 IN {CLEAN}
750-022-G6	ACTR/AIR LINE 20 IN {CLEAN}
750-022-G7	Actuator/Air Line 76.2 cm (30 in.),Clean
750-028-G5	BK XTAL SNS/FT/AIR 12 IN CLEAN
750-028-G6	BK XTAL SNS/FT/AIR 20 IN CLEAN
750-028-G7	BK XTAL SNS/FT/AIR 30 IN CLEAN
750-115-P4	聯(lián)軸器（安裝到波紋管組件）
750-118-P4	ACT SUPPORT W/ DOWEL
750-120-G3	ASSY,SHAFT
750-216-G1	閘門組件（閘門模塊的組成部分）
750-218-G1	Crystal Holder, Bakeable Sensor