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高純度靶材采用美國Princeton Scientific金屬、非金屬和化合物制成的濺射靶材,純度在99.9%到99.9999%之間。高純度靶材可提供單元素純金屬和定制化合物。各種幾何形狀；圓形、矩形、多層瓦和階梯式結(jié)構(gòu)都可提供。
有關(guān)更多高純度靶材信息，請(qǐng)查看我們的標(biāo)準(zhǔn)和專業(yè)目標(biāo)列表。我們可以根據(jù)您的具體需求生產(chǎn)濺射靶材.我們將幫助您選擇合適的目標(biāo)材料、制造工藝和粘接組件，以確保薄膜沉積工藝的成功。
我們的濺射靶材是通過熔融或粉末冶金工藝制備的。
高純度靶材列表

材料	分子式	可提供純度
鋁Aluminum	Al	99.9% - 99.9995%
銻化鋁Aluminum antimonide	AlSb	99.99%
硼化鋁Aluminum boride	AlB2	99.5%
氟化鋁Aluminum fluoride	AlF3	99.9% - 99.99%
氮化鋁Aluminum nitride	AlN	99.5%
氧化鋁Aluminum oxide	Al2O3	99.9% - 99.99%
磷化鋁Aluminum phosphide	AlP	99.95%
氮氧化鋁Aluminum oxynitride	Al3NO3H2O	99.50%
銻Antimony	Sb	99.99% - 99.999%
Antimony (III) sulfide	Sb2S3	99.9% - 99.99%
Antimony oxide	Sb2O3	99.9% - 99.99%
Antimony telluride	Sb2Te3	99.99% - 99.999%
Arsenic	As	99.9% - 99.9999%
Arsenic oxide	As2O3	99.9%
Arsenic telluride	As2Te3	99.99%
Barium strontium titanate	BST	99.9% - 99.95%
Barium sulfide	BaS	99.9%
Barium zirconate	BaZr03	99.5%
Barium ferrite	BaFe12O19	99.9%
Barium fluoride	BaF2	99.9% - 99.99%
Barium oxide	BaO	99.5% - 99.9%
Barium titanate	BaTiO(3)	99.9% - 99.99%

Bismuth	Bi	99.9% - 99.999%
Bismuth oxide	Bi2O3	99.9% - 99.999%
Bismuth sulfide	Bi2S3	99.9% - 99.99%
Bismuth telluride	Bi2Te3	99.9% - 99.999%
Bismuth titanate	Bi4Ti3O12	99.9% - 99.99%

Boron	B	99% - 99.999%
Boron carbide	B4C	99.5%
Boron nitride	BN	99.5% - 99.9%
Boron oxide	B2O3	99.9%

Cadmium	Cd	99.9% - 99.99%
Cadmium arsenide	Cd3As2	99.9% - 99.99%
Cadmium chloride	CdCl2	99.9%
Cadmium fluoride	CdF2	99.9% - 99.99%
Cadmium oxide	CdO	99.9% - 99.99%
Cadmium selenide	CdSe	99.9% - 99.999%
Cadmium stannate	Cd2SnO4	99.9% - 99.99%
Cadmium sulfide	CdS	99.9% - 99.999%
Cadmium telluride	CdTe	99.9% - 99.999%

Calcium fluoride	CaF2	99.9% - 99.99%
Calcium oxide	CaO	99.95%
Calcium sulfide	CaS	99.9% - 99.95%
Calcium titanate	CaTiO3	99.9%
Calcium phosphate	Ca3(PO4)2	99.90%
Calcium phosphate tribasic	Ca10 (OH)2 (PO4)6	99.90%

Carbon	C	99.9% - 99.999%

Cerium	Ce	99.9% - 99.95%
Cerium fluoride	CeF3	99.9% - 99.95%
Cerium oxide	CeO2	99.5% - 99.95%

Cesium fluoride	CsF	99.9% - 99.99%
Cesium iodide	CsI	99.9% - 99.95%

Chromium	Cr	99.5% - 99.999%
Chromium oxide	CrO3	99.9%
Chromium boride	CrB2	99.9%
Chromium carbide	Cr3C2	99.9%
Chromium fluoride	CrF3	99.9%
Chromium nitride	Cr2N	99.9% - 99.99
Chromium oxide	Cr2O3	99.9% - 99.95%
Chromium silicide	CrSi2	99.9% - 99.95%
Chromium sulfide	Cr2S3	99.9%

Cobalt	Co	99.9% - 99.999%
Cobalt ferrite	CoFe2O4	99.9%
Cobalt oxide	CoO	99.9% - 99.95%
Cobalt oxide	Co3O4	99.95%
Cobalt silicide	CoSi2	99.5% - 99.95%

Copper	Cu	99.9% - 99.9999%
Copper (II) sulfide	CuS	99.9% - 99.95%
Copper oxide	Cu2O	99.9% - 99.99%
Copper oxide	CuO	99.9% - 99.99%
Copper phosphide	Cu3P	99.9%
Copper selenide	CuSe	99.9% - 99.99%
Copper sulfide	Cu2S	99.9%

Dysprosium	Dy	99.9% - 99.95%
Dysprosium fluoride	DyF3	99.9% - 99.99%
Dysprosium oxide	Dy2O3	99.9% - 99.99%

Erbium fluoride	ErF3	99.9% - 99.95%
Erbium oxide	Er2O3	99.9% - 99.99%

Europium	Eu	99.9%
Europium oxide	Eu2O3	99.9% - 99.99%

Gadolinium	Gd	99.9%
Gadolinium fluoride	Gd2F3	99.9%
Gadolinium gallium garnet	Gd3Ga5O12	99.9%

Gallium	Ga	99.99% - 99.9999%
Gallium antimonide	GaSb	99.99% - 99.999%
Gallium arsenide	GaAs	99.9% - 99.999%
Gallium nitride	GaN	99.9% - 99.99%
Gallium oxide	Ga2O3	99.9% - 99.99%

Germanium	Ge	99.99% - 99.999%
Germanium nitride	Ge3N4	99.9%
Germanium oxide	GeO2	99.9% - 99.99%
Germanium selenide	GeSe2	99.99%
Germanium sulfide	GeS	99.99%
Germanium telluride	GeTe	99.99% - 99.999%

Gold	Au	99.9% - 99.999%

Hafnium	Hf	99.5%
Hafnium (IV) fluoride	HfF4	99.9%
Hafnium boride	HfB2	99.5% - 99.9%
Hafnium carbide	HfC	99.5%
Hafnium oxide	HfO2	99.5% - 99.95%

Holmium	Ho	99.9%
Holmium oxide	Ho2O3	99.9% - 99.95%

Indium	In	99.9% - 99.9999%
Indium telluride	In2Te3	99.9% - 99.999%
Indium antimonide	InSb	99.9% - 99.999%
Indium nitride	InN	99.9% - 99.99%
Indium oxide	In2O3	99.99% - 99.999%
Indium phosphide	InP	99.99%
Indium selenide	In2Se3	99.95% - 99.999%
Indium oxide/Tin oxide (ITO)	In2O3/SnO2	99.99% - 99.999%

Iridium	Ir	99.9% - 99.99%
Iridium oxide	IrO2	99.9%

Iron	Fe	99.9% - 99.99%
Iron boride	FeB	99.5% - 99.99%
Iron carbide	Fe3C	99.9%
Iron nickel oxide	NiFe2O4	99.5% - 99.9%
Iron nitride	FeN4	99.9%
Iron oxide	Fe2O3	99.9% - 99.99%
Iron oxide	Fe3O4	99.9% - 99.99%
Iron silicide	FeSi2	99.9% - 99.99%
Iron disulfide	FeS2	99.9% - 99.995%

Lanthanum	La	99.9%
Lanthanum aluminate	LaAlO3	99.5%
Lanthanum boride	LaB6	99.5% - 99.9%
Lanthanum strontium manganate	(La0.7Sr0.3)MnO3	99.9%
Lanthanum titanate	LaTiO3	99.9%

Lead	Pb	99.9% - 99.99%
Lead (II) oxide	PbO	99.9% - 99.99%
Lead selenide	PbSe	99.9% - 99.99%
Lead telluride	PbTe	99.9% - 99.999%
Lead titanate	PbTiO3	99.9% - 99.99%

Lithium carbonate	Li2CO3	99.9%
Lithium cobalt oxide	LiCoO2	99.9%
Lithium fluoride	LiF	99.9% - 99.99%
Lithium manganese oxide	LiMn2O4	99.9%
Lithium niobium oxide	LiNbO3	99.9%
Lithium oxide	Li2O	99.9%
Lithium peroxide	Li2O2	99.9%
Lithium phosphate	Li3PO4	99.9% - 99.99%
Lithium sulfate	Li2SO4	99.9%
Lithium sulfide	Li2S	99.9% - 99.99%
Lithium tetraborate	Li3BO4	99.99%
Lithium titanate	Li2TiO3	99.9%

Lutetium	Lu	99.9% - 99.95%
Lutetium oxide	Lu2O3	99.9% - 99.99%

Magnesium	Mg	99.9% - 99.99%
Magnesium aluminate	MgAl2O4	99.9%
Magnesium diboride	MgB2	99.9%
Magnesium fluoride	MgF2	99% - 99.99%
Magnesium oxide	MgO	99.9% - 99.99%
Magnesium silicide	Mg2Si	99.9%
Magnesium sulfide	MgS	99.9%

Manganese	Mn	99.9% - 99.95%
Manganese fluoride	MnF2	99.9%
Manganese Nitride	MnN4	99.9%
Manganese oxide	MnO	99.9%
Manganese oxide	MnO2	99.9%
Manganese oxide	Mn2O3	99.9%
Manganese selenide	MnSe	99.95%
Manganese sulfide	MnS	99.9% - 99.95%
Manganese telluride	MnTe	99.9% - 99.95%

Mercury selenide	HgSe	99.99% - 99.999%
Mercury telluride	HgTe	99.9% - 99.99%

Molybdenum	Mo	99.9% - 99.99%
Molybdenum boride	MoB	99.5%
Molybdenum carbide	MO2C	99.9%
Molybdenum disulfide	MoS2	99.5% - 99.9%
Molybdenum oxide	MoO3	99.9%
Molybdenum oxide	MoO2	99.9%
Molybdenum selenide	MoSe2	99.9% - 99.99%
Molybdenum silicide	MoSi2	99.9% - 99.99%
Molybdenum telluride	MoTe2	99.9% - 99.99%

Neodymium	Nd	99.9%

Nickel	Ni	99.8% - 99.999%
Nickel boride	Ni2B	99.5%
Nickel disilicide	NiSi2	99.9%
Nickel oxide	NiO	99% - 99.995%
Nickel telluride	NiTe	99.9%

Niobium	Nb	99.8% - 99.99%
Niobium carbide	NbC	99.5%
Niobium oxide	Nb2O5	99.9% - 99.999%
Niobium oxide	NbO2	99.9% - 99.99%
Niobium selenide	NbSe2	99.9%

Osmium	Os	99.9% - 99.95%

Palladium	Pd	99.9% - 99.995%
Palladium oxide	PdO	99.9% - 99.95%

Phosphorus oxide	P2O5	99.95%

Platinum	Pt	99.9% - 99.999%

Praseodymium	Pr	99.9%

Rhenium	Re	99.9% - 99.99%

Rhodium	Rh	99.9% - 99.99%
Rhodium oxide	Rh2O3	99.9%

Ruthenium	Ru	99.9% - 99.99%
Ruthenium oxide	RuO2	99.9%

Samarium	Sm	99.9%
Samarium fluoride	SmF3	99.9% - 99.95%
Samarium oxide	Sm2O3	99.9% - 99.99%

Scandium	Sc	99.9% - 99.99%
Scandium oxide	Sc2O3	99.9% - 99.99%

Selenium	Se	99.9% - 99.9999%
Selenium oxide	SeO2	99.9%

Silicon	Si	99.9% - 99.999%
Silicon carbide	SiC	99.5% - 99.9%
Silicon dioxide	SiO2	99.9% - 99.999%
Silicon monoxide	SiO	99.9% - 99.99%
Silicon nitride	Si3N4	99.5% - 99.9%
Silicon sulfide	SiS2	99.5% - 99.99%

Silver	Ag	99.9% - 99.99%
Silver chloride	AgCl	99.9%
Silver oxide	Ag2O	99.9%

Sodium aluminum fluoride	Na5Al3F14	99.5%
Sodium carbonate	Na2CO3	99.9%
Sodium chloride	NaCl	99.9%
Sodium fluoride	NaF	99.9%
Sodium oxide	Na2O2	99.9%

Strontium carbonate	SrCO3	99.9%
Strontium fluoride	SrF2	99.9%
Strontium molybdate	SrMoO4	99.9%
Strontium oxide	SrO	99.9%
Strontium ruthenate	SrRuO3	99.9%
Strontium sulfide	SrS	99.9%
Strontium titanate	SrTiO3	99.9% - 99.95%
Strontium zirconate	SrZrO3	99.9%

Sulfur	S	99.9%

Tantalum	Ta	99.9% - 99.99%
Tantalum carbide	TaC	99.9%
Tantalum nitride	TaN	99.5%
Tantalum pentoxide	Ta2O5	99.9% - 99.99%
Tantalum selenide	TaSe2	99.9%
Tantalum silicide	TaSi2	99.5% - 99.9%

Tellurium	Te	99.9% - 99.999%
Tellurium oxide	TeO2	99.9% - 99.99%

Terbium	Tb	99.9%
Terbium fluoride	TbF3	99.9%
Terbium fluoride oxide	TbOF	99.9%
Terbium oxide	Tb4O7	99.9% - 99.95%

Tin	Sn	99.9% - 99.999%
Tin (IV) fluoride	SnF2	99.9%
Tin oxide	SnO2	99.9% - 99.99%
Tin Sulfide	SnS2	99.9%
Tin telluride	SnTe	99.9% - 99.99%

Titanium	Ti	99.9% - 99.999%
Titanium aluminide	Ti3Al	99.90%
Titanium boride	TiB2	99.50%
Titanium carbide	TiC	99.9%
Titanium dioxide	TiO2	99.9% - 99.999%
Titanium fluoride	TiF3	99.90%
Titanium monoxide	TiO	99.9% - 99.999%
Titanium nitride	TiN	99.5% - 99.99%
Titanium oxide	Ti2O3	99.900%
Titanium selenide	TiSe2	99.9% - 99.99%
Titanium silicide	TiSi2	99.5% - 99.95%

Tungsten	W	99.9% - 99.999%
Tungsten carbide	WC	99.5%
Tungsten oxide	WO3	99.9% - 99.99%
Tungsten selenide	WSe2	99.9%
Tungsten silicide	WSi2	99.9% - 99.95%
Tungsten sulfide	WS2	99.9%
Tungsten telluride	WTe2	99.9% - 99.99%

Vanadium	V	99.5% -99.9%
Vanadium carbide	VC	99.5%
Vanadium dioxide	VO2	99.9%
Vanadium nitride	VN	99.9%
Vanadium oxide	V2O3	99.9%
Vanadium pentoxide	V2O5	99.9% - 99.99%
Vanadium selenide	VSe2	99.9%
Vanadium sulfide	V2S3	99.9%

Ytterbium	Yb	99.9%
Ytterbium fluoride	YbF3	99.95%
Ytterbium oxide	Yb2O3	99.9% - 99.99%

Yttrium	Y	99.9% - 99.99%
Yttrium aluminum oxide	Y3Al5O12	99.9%
Yttrium ferrite	Y3Fe5O12	99.9%
Yttrium fluoride	YF3	99.9% - 99.99%
Yttrium oxide	Y2O3	99.9% - 99.99%

Zinc	Zn	99.9% - 99.999%
Zinc fluoride	ZnF2	99.9% - 99.99%
Zinc nitride	Zn3N2	99.9%
Zinc oxide	ZnO	99.9% - 99.999%
Zinc phosphide	Zn3P2	99.9%
Zinc selenide	ZnSe	99.99% - 99.995
Zinc sulfide	ZnS	99.9% - 99.99%
Zinc telluride	ZnTe	99.99%

Zirconium	Zr	99.5% - 99.9
Zirconium boride	ZrB2	99.5%
Zirconium carbide	ZrC	99.5%
Zirconium chloride	ZrCl4	99.5%
Zirconium fluoride	ZrF4	99.9%
Zirconium nitride	ZrN	99.9%
Zirconium oxide	ZrO2	99.5% - 99.9%
Zirconium silicide	ZrSi2	99.9%
Zirconium oxide/Yttrium oxide (YSZ)	ZrO2/Y2O3	99.90%

Metals
Aluminium	Chromium	Lead	Platinum	Tantalum
Antimony	Cobalt	Lithium	Potassium	Tellurium
Barium	Gallium	Magnesium	Rhenium	Tin
Beryllium	Germanium	Manganese	Rhodium	Titanium
Bismuth	Gold	Molybdenum	Rubidium	Tungsten
Boron	Hafnium	Niobium	Ruthenium	Vanadium
Cadmium	Indium	Nickel	Selenium	Zinc
Calcium	Iridium	Osmium	Silicon	Zirkonium
Carbon	Iron	Palladium	Strontium

Rare Earth
Cerium	Gadolinium	Neodymium	Terbium	Various Rare
Dysprosium	Holmium	Praseodymium	Thulium	Earth alloys
Erbium	Lutetium	Samarium	Ytterbium
Europium	Lanthanum	Scandium	Yttrium

Alloys
Al/B	Au/Pd	Co/Ni	Ge/Si	Pt/Ru
Al/Cu	Au/Pt	Co/Ta/Zr	Ge/Te	Pt/Ag
Al/Cu/Si	Au/Sn	Cr/SiO2Cermet	In/Sn	Sb/In
Al/Cr	Au/Zn	Cu/Al	Ir/Mn	Sb/In/Sn
Al/Li	Bi/Sb	Cu/Cr	Ni/Cr	Si/Al
Al/Mg	Bi/Sb/Se	Cu/Ga	Ni/Fe	Si/Cr
Al/Si	Bi/Sb/Se/Te	Cu/Ni	Ni/Ti	Ta/Ti
Al/Ti	Bi/Sb/Te	Cu/Sn	Ni/V	Ti/Al
Au/Sb	Bi/Se	Fe/Al/Si	Ni/Zr	Ti/W
Au/Ag	Bi/Te	Fe/Cr	Os/Ru	Ti/Zr
Au/B	Cd/Te	Fe/Mn	Pb/Se	W/Ti
Au/Be	So/Cr	Fe/Ru/Ga/Si	Pb/Te	Zn/Al
Au/Ge	Co/Fe	Fe/Si	Pb/Se/Te	Zr/Y
Au/Ir	Co/Nb/Zr	Fe/Si/B/C	Pd/Pt	ａnd others

Oxides
Al2O3	CuO	PbZrO3	Supercond.	Y2O3
Sb2O3	HfO2 unstab.	LiNbO3	SrO	ZnO
BaTiO3	HfO2/CaO	MgO	SrTiO3	ZnO dop.
Bi2O3	HfO2/Y2O3	MoO3	SrZrO3	ZrO2 unstab.
Bi2TiO5	In2O3	Nb2O3	Ta2O5	ZrO2/CaO
Bi4Ti3O12	ITO	Nb2O5	ThO2	ZrO2/Y2O3
BiTiO3	LaAlO3	RE2O3	SnO2
CeO2	La2O3	SiO2	TiO2
CrO3	PbTiO3	SiO	WO3	ａnd others